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UP Chemical Co.,Ltd.

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Home> 제품정보 > 용도별분류 > 반도체용 > Capacitor & Gate High-k Dielectrics

CpZr(NMe2)3 (ZOA203) [Zr40-002]

Physical Characteristics
Chemical Name Cyclopentadienyl Tris(dimethylamino) Zirconium
Formula CpZr[(N(CH3)2)3]
Molecular Weight 288.5
Boiling Point 83℃
Density 1.19
Phase at 25 ℃ Pale yellow liquid
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