¹Ù·Î°¡±â ¸Þ´º
º»¹® ¹Ù·Î°¡±â
¸Þ´º ¹Ù·Î°¡±â
¹Ù´Ú±Û ¹Ù·Î°¡±â
>
Á¦Ç°Á¤º¸
> ¿ëµµº°ºÐ·ù > ¹ÝµµÃ¼¿ë >
Capacitor & Gate High-k Dielectrics
TDMAT [Ti22-002]
Physical Characteristics
Chemical Name
Tetrakis(dimethylamino) Titanium
Formula
Ti[N(CH
3
)
2
]
3
Molecular Weight
224.28
Boiling Point
50¡É/0.5torr
Density
0.95
Phase at 25 ¡É
Yellowish liquid