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UP Chemical Co.,Ltd.

  • Periodic table
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    • For semiconductor
      • Capacitor & Gate High-k Dielectrics
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      • DPT & TSV SIO₂
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      • Metallization
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      • Spin-on Dielectric
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Home> Product > Categorize by use > For semiconductor > SIO₂/SIN

TDMAS [Si14-001]

Physical Characteristics
Chemical Name Tetrakis(dimethylamino) Silane
Formula Si[N(CH3)2]4
Molecular Weight 204.39
Boiling Point 190°C
Density 0.91
Phase at 25 ℃ colorless liquid
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