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UP Chemical Co.,Ltd.

  • Laboratory introduction
  • ALD/CVD Precursor
  • Sin-on Dielectric Materials for SiO2
  • R&D Network

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In particular, UP Chemical has developed TMA, TEMAHf, and TEMAZr, which are ingredients to metalize DRAM charge storage materials through the ALD method. Moreover, UP Chemical has developed the polysilazane SOD materials, which had previously been monopolized by one company in the world, and is applying the materials in its mass-production while also developing other coating materials including a synthesis of organic-inorganic composite materials.

At this moment, at the laboratory of UP Chemical, outstanding researchers are developing materials to use in the display and semiconductor business as well as evaluating and improving the developed materials in cooperation with semiconductor devices and equipment entities in and out of Korea. UP Chemical has secured numerous intellectual property rights through the efforts of the researchers and is striving to create powerful patents.