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UP Chemical Co.,Ltd.

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Home> Product > Categorize by use > For semiconductor > Capacitor & Gate Elctrode

TTBA [Al13-003]

Physical Characteristics
Chemical Name Tris(tertiary-butyl) Aluminum
Formula Al[C(CH3)3]3
Molecular Weight 198.32
Boiling Point 86℃
Density 0.75
Phase at 25 ℃ Colorless liquid
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