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Home> Product > Categorize by use > For semiconductor > Capacitor & Gate Elctrode

TBITEMATa [Ta73-001]

Physical Characteristics
Chemical Name Tertiary-Butyl Imido Tris-Ethylmethylamido Tantalium
Formula [(CH3)3CN]Ta[N(CH3)(C2H5)]3
Molecular Weight g/mol
Boiling Point 70℃/0.1torr
Density 1.3
Phase at 25 ℃ Yellow to orange liquid
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