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Capacitor & Gate High-k Dielectrics
CpZr(NMe
2
)
3
(ZOA203) [Zr40-002]
Physical Characteristics
Chemical Name
Cyclopentadienyl Tris(dimethylamino) Zirconium
Formula
CpZr[(N(CH
3
)
2
)
3
]
Molecular Weight
288.5
Boiling Point
83¡É
Density
1.19
Phase at 25 ¡É
Pale yellow liquid