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Capacitor & Gate High-k Dielectrics
TEMAZr [Zr40-001]
Physical Characteristics
Chemical Name
Tetrakis(ethylmethylamino) Zirconium
Formula
Zr[N(CH
3
)C
2
H
5
]
4
Molecular Weight
323.68
Boiling Point
81¡É/0.1torr
Density
1.05
Phase at 25 ¡É
Colorless to pale yellow liquid