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Capacitor & Gate High-k Dielectrics
TBITEMATa [Ta73-001]
Physical Characteristics
Chemical Name
Tertiary-Butyl Imido Tris-Ethylmethylamido Tantalium
Formula
[(CH
3
)
3
CN]Ta[N(CH
3
)(C
2
H
5
)]
3
Molecular Weight
g/mol
Boiling Point
70¡É/0.1torr
Density
1.3
Phase at 25 ¡É
Yellow to orange liquid