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Home> 제품정보 > 반도체 재료 (DRAM & Flash & Logic Device)

BDEAS [ZOA130]

Physical Characteristics
Chemical Name BDEAS (ZOA130)
[Bis-Diethylamino Silane]
Formula H2Si((N(C2H5)2)2
Solid Content 174.4 g/mol
Boiling Point 188℃
Vapor Pressure 4.0torr/ 20℃
Density 0.811 g/mL
Phase at 25 ℃ Colorless Liquid
Safety and Dangerous
NFPA 코드
유해 그림
NFPA 코드유해 그림
Specification
- Assay: 99.9999% (metal base)
[Technical support]
UPChemical Co., Ltd. has consistently developed and produced ALD and CVD Precursors for Display & Solar CellApplications. If you have any question, please contact us.
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