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¹ÝµµÃ¼ Àç·á (DRAM & Flash & Logic Device)
TMA
Physical Characteristics
Chemical Name
TMA
[Trimethyl Aluminum]
Formula
C
3
H
9
Al
Solid Content
72.09g/mol
Boiling Point
125¡É
Vapor Pressure
rr/20¡É
Density
0.752g/mL
Phase at 25 ¡É
Colorless Liquid
Safety and Dangerous
NFPA ÄÚµå
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NFPA ÄÚµå
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Specification
- Assay: 99.9999% (metal base)