¹Ù·Î°¡±â ¸Þ´º
º»¹® ¹Ù·Î°¡±â
¸Þ´º ¹Ù·Î°¡±â
¹Ù´Ú±Û ¹Ù·Î°¡±â
>
Á¦Ç°Á¤º¸
>
¹ÝµµÃ¼ Àç·á (DRAM & Flash & Logic Device)
Cp-Zr [ZOA203]
Physical Characteristics
Chemical Name
CpZr(NMe
2
)
3
[ZOA203]
[Cyclopentadienyl Tris(dimethylamino) Zirconium]
Phase at 25 ¡É
CpZr[N(CH
3
)
2
)
3
]
Solid Content
288.55g/mol
Boiling Point
83¡É/0.1torr
Vapor Pressure
0.2torr/70¡É
Density
1.19g/mL
Phase at 25 ¡É
Pale yellow Liquid
Safety and Dangerous
NFPA ÄÚµå
À¯ÇØ ±×¸²
NFPA ÄÚµå
À¯ÇØ ±×¸²
Specification
- Assay: 99.9999% (metal base)
[Technical support]
UPChemical Co., Ltd. has consistently developed and produced ALD and CVD Precursors for Display & Solar CellApplications. If you have any question, please contact us.