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UP Chemical Co.,Ltd.

  • Laboratory introduction
  • ALD/CVD Precursor
  • R&D Network

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In particular, UP Chemical has developed TMA, TEMAHf, and TEMAZr, which are ingredients to metalize DRAM charge storage materials through the ALD method.

At this moment, at the laboratory of UP Chemical, outstanding researchers are developing materials to use in the display and semiconductor business as well as evaluating and improving the developed materials in cooperation with semiconductor devices and equipment entities in and out of Korea. UP Chemical has secured numerous intellectual property rights through the efforts of the researchers and is striving to create powerful patents.