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UP Chemical Co.,Ltd.

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      • Capacitor & Gate High-k 
Dielectrics
      • Capacitor & 
Gate Elctrode
      • DPT & TSV SIO©ü
      • SIO©ü/SIN
      • GST
      • Metallization
      • ReRAM
      • Spin-on Dielectric
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TDEAT [Ti22-003]

Physical Characteristics
Chemical Name Tetrakis(diethylamino) Titanium
Formula Ti[N(C2H5)2]4
Molecular Weight 336.38
Boiling Point 100¡É/0.2torr
Density 0.94
Phase at 25 ¡É Yellow liquid
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