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UP Chemical Co.,Ltd.

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    • 반도체용
      • Capacitor & Gate High-k Dielectrics
      • Capacitor & Gate Elctrode
      • DPT & TSV SIO₂
      • SIO₂/SIN
      • GST
      • Metallization
      • ReRAM
      • Spin-on Dielectric
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Home> 제품정보 > 용도별분류 > 반도체용 > Capacitor & Gate Elctrode

TBTDET [Ta73-002]

Physical Characteristics
Chemical Name Tertiarybutyl-imido Tris(diethylamino) Tantalum
Formula [(CH3)3CN]Ta[(N(C2H5)2)]3
Molecular Weight 468.51
Boiling Point 95℃/0.5torr
Density 1.25
Phase at 25 ℃ Pale yellow liquid
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