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UP Chemical Co.,Ltd.

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  • 용도별분류
    • 반도체용
      • Capacitor & Gate High-k 
Dielectrics
      • Capacitor & 
Gate Elctrode
      • DPT & TSV SIO₂
      • SIO₂/SIN
      • GST
      • Metallization
      • ReRAM
      • Spin-on Dielectric
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Home> 제품정보 > 용도별분류 > 반도체용 > Spin-on Dielectric

Ceramable® 560 [Ceramable® 560]

Physical Characteristics
Description The Spin-on Dielectric is a coating material for semiconductors which is applied in the SiO2 thin film manufacturing process and is used as an insulation material.
Currently, SiO2 thin film has been made using the CVD (Chemical Vapor Deposition) process. However as the miniaturization and high integration has been processed rapidly, the spin process has been applied to prevent from void due to lack of gap
This material is able to improve productivity in the vacuum evaporation process and reduce the cost of equipment investment.
Advantage Excellent gap-filling without void
Excellent surface planarity
Very low defect density
High cracking threshold
Controllable film thickness
Strong adhesion to substrate
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