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Capacitor & Gate High-k Dielectrics
TEMAHf [Hf72-001]
Physical Characteristics
Chemical Name
Tetrakis(ethylmethylamino) Hafnium
Formula
Hf[N(CH
3
)C
2
H
5
]
4
Molecular Weight
410.95
Boiling Point
79¡É/0.1torr
Density
1.32
Phase at 25 ¡É
Pale yellow liquid