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UP Chemical Co.,Ltd.

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Home> 제품정보 > 반도체 재료 (DRAM & Flash & Logic Device)

Ceramable®

Physical Characteristics
Chemical Name Ceramable®
[Perhydropolysilazane]
Film THK Range1) 3,700 ~ 6,700Å 2)
Solid Content 19.0 wt%
Metal Impurity < 50 ppb
Gap Filling < 50 nm
Dielectric Constant 1.45 ~ 1.46
Shelf Life 6 months (0 ~ 5℃)
1) For typicalmain spin revolution of 1,000 ~ 4,000 rpm
2) ContactUP Chemical for film thickness requirements outside this range
Safety and Dangerous
NFPA 코드
유해 그림
NFPA 코드유해 그림
Specification
- Assay: 99.9999% (metal base)
[Technical support]
UPChemical Co., Ltd. has consistently developed and produced ALD and CVD Precursors for Display & Solar CellApplications. If you have any question, please contact us.
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