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UP Chemical Co.,Ltd.

  • Periodic table
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    • For semiconductor
      • Capacitor & Gate High-k Dielectrics
      • Capacitor & Gate Elctrode
      • DPT & TSV SIO₂
      • SIO₂/SIN
      • GST
      • Metallization
      • ReRAM
      • Spin-on Dielectric
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Home> Product > Categorize by use > For semiconductor > SIO₂/SIN

TEMASi [Si14-002]

Physical Characteristics
Chemical Name Tetrakis(ethylmethylamino) Silane
Formula Si[N(CH3)(C2H5)]4
Molecular Weight 260.55
Boiling Point 40℃/0.2torr
Density 0.89
Phase at 25 ℃ Colorless liquid
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