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UP Chemical Co.,Ltd.

  • Periodic table
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    • For semiconductor
      • Capacitor & Gate High-k Dielectrics
      • Capacitor & Gate Elctrode
      • DPT & TSV SIO₂
      • SIO₂/SIN
      • GST
      • Metallization
      • ReRAM
      • Spin-on Dielectric
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Home> Product > Categorize by use > For semiconductor > SIO₂/SIN

BDEAS (ZOA130) [Si14-008]

Physical Characteristics
Chemical Name Bis(diethylamino) Silane
Formula H2Si[(N(C2H5)2]2
Molecular Weight 174.36
Boiling Point 188℃
Density 0.81
Phase at 25 ℃ Colorless Liquid
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