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UP Chemical Co.,Ltd.

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    • For semiconductor
      • Capacitor & Gate High-k Dielectrics
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      • DPT & TSV SIO₂
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      • GST
      • Metallization
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      • Spin-on Dielectric
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Home> Product > Categorize by use > For semiconductor > SIO₂/SIN

TPYS (ZOA120) [Si14-011]

Physical Characteristics
Chemical Name Tris(pyrrolidino) Silane
Formula SiH[NC4H8]3
Molecular Weight 239.43
Boiling Point 86℃/0.4torr
Density 0.97
Phase at 25 ℃ Colorless liquid
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