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Product
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Capacitor & Gate High-k Dielectrics
TDMAT [Ti22-002]
Physical Characteristics
Chemical Name
Tetrakis(dimethylamino) Titanium
Formula
Ti[N(CH
3
)
2
]
3
Molecular Weight
224.28
Boiling Point
50¡É/0.5torr
Density
0.95
Phase at 25 ¡É
Yellowish liquid