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Product
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Capacitor & Gate High-k Dielectrics
TDEAT [Ti22-003]
Physical Characteristics
Chemical Name
Tetrakis(diethylamino) Titanium
Formula
Ti[N(C
2
H
5
)
2
]
4
Molecular Weight
336.38
Boiling Point
100¡É/0.2torr
Density
0.94
Phase at 25 ¡É
Yellow liquid