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Home> Product > Categorize by use > For semiconductor > Capacitor & Gate High-k Dielectrics

EtCpZr(NMeEt)3(ZOA201) [Zr40-003]

Physical Characteristics
Chemical Name Ethylcyclopentadienyl Tris(ethylmethylamino) Zirconium
Formula ((C2H5)C5H4)Zr[N(CH3)C2H5]3
Molecular Weight 358.68g/mol
Phase at 25 ℃ Yellow liquid
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