¹Ù·Î°¡±â ¸Þ´º


UP Chemical Co.,Ltd.

  • Periodic table
  • Categorize by use
    • For semiconductor
      • Capacitor & Gate High-k Dielectrics
      • Capacitor & 
Gate Elctrode
      • DPT & TSV SIO©ü
      • SIO©ü/SIN
      • GST
      • Metallization
      • ReRAM
      • Spin-on Dielectric
    • For non-semiconductor
  • View all products

Home> Product > Categorize by use > For semiconductor > Capacitor & Gate High-k Dielectrics

TEMAHf [Hf72-001]

Physical Characteristics
Chemical Name Tetrakis(ethylmethylamino) Hafnium
Formula Hf[N(CH3)C2H5]4
Molecular Weight 410.95
Boiling Point 79¡É/0.1torr
Density 1.32
Phase at 25 ¡É Pale yellow liquid
 
ÁÖ±âÀ²Ç¥ º¸±â