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Product
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Capacitor & Gate High-k Dielectrics
TBTDET [Ta73-002]
Physical Characteristics
Chemical Name
Tertiarybutyl-imido Tris(diethylamino) Tantalum
Formula
[(CH
3
)
3
CN]Ta[(N(C
2
H
5
)
2
)]
3
Molecular Weight
468.51
Boiling Point
95¡É/0.5torr
Density
1.25
Phase at 25 ¡É
Pale yellow liquid