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Product
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Semiconductor Materials
TBITEMATa
Physical Characteristics
Chemical Name
TBITEMATa
[Tertiary-Butyl Imido Tris-Ethylmethylamino Tantalum]
Formula
[(
t
BuN)Ta(N(CH
3
)(C
2
H
5
))
3
]
Solid Content
426.38 g/mol
Boiling Point
70¡É/0.1torr
Vapor Pressure
0.1torr/80¡É
Density
1.30g/mL
Phase at 25 ¡É
Pale Yellow Liquid
Safety and Dangerous
NFPA Code
À¯ÇØ ±×¸²
NFPA Code
À¯ÇØ ±×¸²
Specification
- Assay: 99.9999% (metal base)